Patent Assignment
Reel/Frame 060132/0750
Assignment of Assignor's Interest
Recorded: 2022-06-08
Pages: 3
Assignor
ABEL, PAUL
Executed: 2022-06-07
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods For Non-Isothermal Wet Atomic Layer Etching