Patent Assignment
Reel/Frame 060148/0001
Assignment of Assignor's Interest
Recorded: 2022-06-09
Pages: 7
Assignors
TAKATSUKI, KOICHI
Executed: 2019-09-11
ISHIZAKA, TADAHIRO
Executed: 2019-09-17
SUZUKI, MIKIO
Executed: 2019-09-17
HASEGAWA, TOSHIO
Executed: 2019-09-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Surface Processing Method and Processing System
Application:
17/835,056 →
Publication:
US 2022/0301882