Patent Assignment
Reel/Frame 060148/0540
Assignment of Assignor's Interest
Recorded: 2022-06-09
Pages: 6
Assignors
PARK, KANGMIN
Executed: 2022-04-19
KIM, HYUNGHO
Executed: 2022-04-19
WI, DONGWOO
Executed: 2022-04-19
CHUN, HYUNSOO
Executed: 2022-04-19
UH, JIHO
Executed: 2022-04-19
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Valve Structure and Substrate Processing Apparatus Including the Same