Patent Assignment
Reel/Frame 060184/0578
Assignment of Assignor's Interest
Recorded: 2022-06-13
Pages: 4
Assignors
JU, SHI NING
Executed: 2020-06-17
CHIANG, KUO-CHENG
Executed: 2020-06-16
WANG, CHIH-HAO
Executed: 2020-06-16
CHENG, KUAN-LUN
Executed: 2020-06-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
FinFET Devices with a Backside Power Rail and a Backside Self-Aligned Via Disposed between Dielectric Fins