Patent Assignment
Reel/Frame 060210/0157
Assignment of Assignor's Interest
Recorded: 2022-06-15
Pages: 7
Assignors
KOCH, MARKUS
Executed: 2022-06-03
CAPELLI, RENZO
Executed: 2022-06-07
GWOSCH, KLAUS
Executed: 2022-06-09
SIMAKOV, DMITRY
Executed: 2022-06-03
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Determining an Imaging Quality of an Optical System When Illuminated by Illumination Light Within a Pupil to Be Measured