Patent Assignment
Reel/Frame 060234/0502
Assignment of Assignor's Interest
Recorded: 2022-06-17
Pages: 6
Assignors
TAKATA, FUMIYA
Executed: 2022-06-10
YOSHIMURA, SHOTA
Executed: 2022-06-10
MORIKITA, SHINYA
Executed: 2022-06-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Plasma Processing Apparatus