Patent Assignment
Reel/Frame 060315/0457
Assignment of Assignor's Interest
Recorded: 2022-06-09
Pages: 3
Assignor
KOBAYASHI, DAISUKE
Executed: 2022-04-18
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Illumination Optical System, Exposure Apparatus and Method of Manufacturing Article