Patent Assignment
Reel/Frame 060360/0085
Assignment of Assignor's Interest
Recorded: 2022-06-29
Pages: 5
Assignors
CHEN, SHIH-CHENG
Executed: 2022-06-07
LIN, ZHI-CHANG
Executed: 2022-06-06
CHANG, JUNG-HUNG
Executed: 2022-06-06
YAO, CHIEN NING
Executed: 2022-06-07
CHUANG, TSUNG-HAN
Executed: 2022-06-07
CHUANG, KAI-LIN
Executed: 2022-06-07
CHIANG, KUO-CHENG
Executed: 2022-06-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device Including Forming a Sidewall Spacer on a Sidewall of a Channel Structure