Patent Assignment
Reel/Frame 060369/0397
Assignment of Assignor's Interest
Recorded: 2022-06-30
Pages: 5
Assignor
YAMAGUCHI, TATSUYA
Executed: 2022-06-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method and Semiconductor Device Manufacturing System