Patent Assignment
Reel/Frame 060420/0980
Assignment of Assignor's Interest
Recorded: 2022-07-01
Pages: 5
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2022-05-17
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, SUITE 100, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(3)
Multi-Zone Hybrid Plasma Source
Application:
63/192,712 →
Hybrid Plasma Source Array
Application:
63/242,534 →
Hybrid Plasma Source Array
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.