Patent Assignment
Reel/Frame 060425/0752
Assignment of Assignor's Interest
Recorded: 2022-07-01
Pages: 8
Assignors
SU, JUNWEI
Executed: 2022-06-22
NAIK, RUTVIJ
Executed: 2022-06-22
LIN, XING
Executed: 2022-06-22
DEMOS, ALEXANDROS
Executed: 2022-06-22
ESMAEILZADEHKHOSRAVIEH, HAMED
Executed: 2022-06-22
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Apparatus and Methods for Cooling Reaction Chambers in Semiconductor Processing Systems