Patent Assignment
Reel/Frame 060432/0460
Assignment of Assignor's Interest
Recorded: 2022-07-07
Pages: 4
Assignors
OTSUJI, MASAYUKI
Executed: 2020-05-18
TAKAHASHI, HIROAKI
Executed: 2020-05-18
KATO, MASAHIKO
Executed: 2020-05-18
YAMAGUCHI, YU
Executed: 2020-05-22
SASAKI, YUTA
Executed: 2020-05-26
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus