Patent Assignment
Reel/Frame 060456/0403
Assignment of Assignor's Interest
Recorded: 2022-07-07
Pages: 3
Assignors
ZI, AN-REN
Executed: 2022-01-18
WU, CHENG-HAN
Executed: 2022-06-15
CHANG, CHING-YU
Executed: 2022-01-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Photoresist, Method of Manufacturing a Semiconductor Device and Method of Extreme Ultraviolet Lithography
Application:
17/692,490 →
Publication:
US 2023/0288807