Patent Assignment
Reel/Frame 060475/0248
Assignment of Assignor's Interest
Recorded: 2022-07-11
Pages: 4
Assignors
SHIN, JAE
Executed: 2021-01-12
RICHARDSON, JOSEPH
Executed: 2021-01-11
VELMURUGAN, JEYAVEL
Executed: 2021-01-12
PONNUSWAMY, THOMAS ANAND
Executed: 2021-01-12
MAYER, STEVEN T.
Executed: 2021-01-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tsv Process Window and Fill Performance Enhancement by Long Pulsing and Ramping