Patent Assignment
Reel/Frame 060481/0617
Assignment of Assignor's Interest
Recorded: 2022-07-12
Pages: 7
Assignors
YEH, TSE-AN
Executed: 2021-08-02
LEAVY, MONTRAY
Executed: 2021-07-28
CHEN, CHUN KUANG
Executed: 2022-04-20
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Properties
(2)
High Quantum Efficiency Dry Resist for Low Exposure Dose of Euv Radiation
High Quantum Efficiency Dry Resist for Low Exposure Dose of Euv Radiation
Application:
63/178,911 →
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.