Patent Assignment
Reel/Frame 060485/0301
Assignment of Assignor's Interest
Recorded: 2022-07-12
Pages: 3
Assignors
PENG, GORDON
Executed: 2021-04-14
ROSSLEE, CRAIG
Executed: 2021-04-14
MAROHL, DAN
Executed: 2021-04-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Multizone Gas Distribution Plate for Trench Profile Optimization