Patent Assignment
Reel/Frame 060492/0086
Assignment of Assignor's Interest
Recorded: 2022-07-13
Pages: 7
Assignors
HAN, DONGSEOK
Executed: 2022-06-03
BAEK, SEUNGHAN
Executed: 2022-06-13
KIM, KYUNG-SUN
Executed: 2022-06-10
KIM, NAM KYUN
Executed: 2022-06-08
NAM, SANG KI
Executed: 2022-06-13
YOON, KUIHYUN
Executed: 2022-06-03
JEON, KANGMIN
Executed: 2022-06-10
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Focus Ring, and Substrate Processing Apparatus Including the Same
Application:
17/850,478 →
Publication:
US 2023/0143327