Patent Assignment
Reel/Frame 060535/0803
Assignment of Assignor's Interest
Recorded: 2022-07-18
Pages: 8
Assignors
ZANDI, OMID
Executed: 2022-07-05
FAGUET, JACQUES
Executed: 2022-07-05
SATHOUD, ORNELLA
Executed: 2022-07-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods For Stabilization Of Self-Assembled Monolayers (SAMs) Using Sequentially Pulsed Initiated Chemical Vapor Deposition (spiCVD)