Patent Assignment
Reel/Frame 060544/0865
Assignment of Assignor's Interest
Recorded: 2022-07-19
Pages: 3
Assignors
LIU, WEI-MIN
Executed: 2021-12-12
SU, LI-LI
Executed: 2022-06-30
YEO, YEE-CHIA
Executed: 2021-12-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods of Forming Transistor Source/Drain Regions Comprising Carbon Liner Layers