Patent Assignment
Reel/Frame 060544/0937
Assignment of Assignor's Interest
Recorded: 2022-07-19
Pages: 9
Assignors
CHENG, YU-HUNG
Executed: 2020-02-25
WU, CHENG-TA
Executed: 2020-04-29
LIU, PO-WEI
Executed: 2022-02-26
TU, YEUR-LUEN
Executed: 2019-12-23
CHANG, YU-CHUN
Executed: 2020-12-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Selective Polysilicon Growth for Deep Trench Polysilicon Isolation Structure