Patent Assignment
Reel/Frame 060554/0774
Assignment of Assignor's Interest
Recorded: 2022-07-19
Pages: 9
Assignors
LEE, HYUNJOO
Executed: 2022-05-19
NAM, SANG KI
Executed: 2022-05-31
JO, YOUNG HYUN
Executed: 2022-05-31
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Edge Ring, Plasma Etching Apparatus Including the Same, and Plasma Etching Method Using the Same
Application:
17/865,773 →
Publication:
US 2023/0142436