Patent Assignment
Reel/Frame 060588/0390
Assignment of Assignor's Interest
Recorded: 2022-07-22
Pages: 3
Assignors
VÄYRYNEN, KATJA
Executed: 2017-02-27
RITALA, MIKKO
Executed: 2017-02-23
LESKELÄ, MARKKU
Executed: 2017-02-23
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Methods for Forming a Metallic Film on a Substrate by Cyclical Deposition and Related Semiconductor Device Structures