Patent Assignment
Reel/Frame 060642/0455
Assignment of Assignor's Interest
Recorded: 2022-07-27
Pages: 4
Assignors
WANG, PO-HSIANG
Executed: 2022-07-18
CHING, MIN-CHANG
Executed: 2022-07-18
LU, KUO LIANG
Executed: 2022-06-28
CHU, BO-HAN
Executed: 2022-06-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Gas Distribution Ring for Process Chamber