Patent Assignment
Reel/Frame 060655/0535
Assignment of Assignor's Interest
Recorded: 2022-07-28
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Process Estimation System, Process Data Estimation Method, and Recording Medium