Patent Assignment
Reel/Frame 060703/0311
Assignment of Assignor's Interest
Recorded: 2022-08-03
Pages: 8
Assignors
YANG, MICHAEL X.
Executed: 2021-01-07
BREMENSDORFER, ROLF
Executed: 2021-01-12
SOHN, MANUEL
Executed: 2021-01-26
Assignee
MATTSON THERMAL PRODUCTS, GMBH.
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
Application:
17/549,096 →
Publication:
US 2022/0199376
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 3, 2022
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 060703/0319 →
Assignment of Assignor's Interest
Aug 3, 2022
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 060703/0323 →