Patent Assignment
Reel/Frame 060703/0319
Assignment of Assignor's Interest
Recorded: 2022-08-03
Pages: 4
Assignor
MATTSON THERMAL PRODUCTS, GMBH.
Executed: 2021-02-19
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
Application:
17/549,096 →
Publication:
US 2022/0199376
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 3, 2022
From: YANG, MICHAEL X.; BREMENSDORFER, ROLF; SOHN, MANUEL
To: MATTSON THERMAL PRODUCTS, GMBH.
Reel/Frame 060703/0311 →
Assignment of Assignor's Interest
Aug 3, 2022
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 060703/0323 →