Patent Assignment
Reel/Frame 060707/0610
Assignment of Assignor's Interest
Recorded: 2022-08-03
Pages: 3
Assignor
CHANG, JEN-YUAN
Executed: 2022-07-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Semiconductor Structure Having Deep Trench Capacitor and Method of Manufacturing Thereof