Patent Assignment
Reel/Frame 060722/0628
Assignment of Assignor's Interest
Recorded: 2022-08-04
Pages: 3
Assignor
CARL ZEISS AG
Executed: 2022-07-29
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for Measuring Substrates for Semiconductor Lithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.