Patent Assignment
Reel/Frame 060731/0403
Assignment of Assignor's Interest
Recorded: 2022-08-05
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods to Automatically Adjust One or More Parameters of a Camera System for Optimal 3D Reconstruction of Features Formed Within/on a Semiconductor Substrate