Patent Assignment
Reel/Frame 060769/0462
Assignment of Assignor's Interest
Recorded: 2022-08-10
Pages: 4
Assignors
LIU, KO-CHENG
Executed: 2020-11-17
LI, MING-SHUAN
Executed: 2020-11-18
CHENG, MING-LUNG
Executed: 2020-11-17
LIU, CHANG-MIAO
Executed: 2020-11-17
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Dielectric Fins with Air Gap and Backside Self-Aligned Contact