Patent Assignment
Reel/Frame 060787/0505
Assignment of Assignor's Interest
Recorded: 2022-08-11
Pages: 5
Assignors
LIN, CHUN-AN
Executed: 2021-12-01
TSENG, KUO-PI
Executed: 2021-07-20
SU, TZU-CHIEH
Executed: 2021-10-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Optimized Proximity Profile for Strained Source/Drain Feature and Method of Fabricating Thereof