Patent Assignment
Reel/Frame 060804/0921
Assignment of Assignor's Interest
Recorded: 2022-08-15
Pages: 4
Assignors
TAKASHI, OGAWA
Executed: 2022-08-09
HWANG, JUN HYEOK
Executed: 2022-08-09
PARK, IN YONG
Executed: 2022-08-09
Assignee
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
1F, 267 GAJEONG-RO, YUSEONG-GU, DAEJEON, 34113, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Deconvoluting and Restoring Image Observed in Charged Particle Beam Apparatus, Image Processing Apparatus, and Charged Particle Beam Apparatus Equipped with Image Processing Apparatus