Patent Assignment
Reel/Frame 060815/0634
Assignment of Assignor's Interest
Recorded: 2022-08-16
Pages: 4
Assignors
LIAO, SONG-FU
Executed: 2022-07-20
CHIANG, KUO-CHANG
Executed: 2022-07-20
CHEN, HAI-CHING
Executed: 2022-07-19
LIN, CHUNG-TE
Executed: 2022-07-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
3D Lateral Patterning via Selective Deposition for Ferroelectric Devices