Patent Assignment
Reel/Frame 060823/0789
Assignment of Assignor's Interest
Recorded: 2022-08-16
Pages: 6
Assignors
MALEEV, IVAN
Executed: 2022-07-27
LU, SHIN-YEE
Executed: 2022-08-08
KLYACHKO, DIMITRI
Executed: 2022-07-27
MENG, CHING LING
Executed: 2022-08-02
TIAN, XINKANG
Executed: 2022-07-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Optical Sensors for Measuring Properties of Consumable Parts in a Semiconductor Plasma Processing Chamber