Patent Assignment
Reel/Frame 060828/0746
Assignment of Assignor's Interest
Recorded: 2022-08-17
Pages: 8
Assignors
FULFORD, DANIEL J.
Executed: 2022-07-26
SCHEPIS, ANTHONY R.
Executed: 2022-07-26
GARDNER, MARK I.
Executed: 2022-08-12
FULFORD, H. JIM
Executed: 2022-08-12
DEVILLIERS, ANTON J.
Executed: 2022-08-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
In-Situ Lithography Pattern Enhancement with Localized Stress Treatment Tuning Using Heat Zones