Patent Assignment
Reel/Frame 060835/0431
Assignment of Assignor's Interest
Recorded: 2022-08-17
Pages: 6
Assignors
HUNSCHE, STEFAN
Executed: 2022-04-05
JIANG, AIQIN
Executed: 2020-11-24
WANG, FUMING
Executed: 2020-11-23
RAGHUNATHAN, SUDHARSHANAN
Executed: 2022-04-08
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Calibrating Simulation Process Based on Defect-Based Process Window
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.