Patent Assignment
Reel/Frame 060861/0262
Assignment of Assignor's Interest
Recorded: 2022-08-22
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
3D Isolation of a Segmentated 3D Nanosheet Channel Region