Patent Assignment
Reel/Frame 060912/0787
Assignment of Assignor's Interest
Recorded: 2022-08-26
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Multi Charged Particle Beam Writing Method and Multi Charged Particle Beam Writing Apparatus
Application:
17/812,815 →
Publication:
US 2022/0359156