Patent Assignment
Reel/Frame 060913/0887
Assignment of Assignor's Interest
Recorded: 2022-08-26
Pages: 3
Assignor
CHAO, BING-SIANG
Executed: 2018-11-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8 LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Optical Mode Optimization for Wafer Inspection