Patent Assignment
Reel/Frame 060930/0470
Assignment of Assignor's Interest
Recorded: 2022-08-29
Pages: 5
Assignors
LEE, CHIH-JIE
Executed: 2018-12-07
HUANG, SHIH-CHUN
Executed: 2018-12-07
CHANG, SHIH-MING
Executed: 2018-12-07
HSIEH, KEN-HSIEN
Executed: 2018-12-07
YEN, YUNG-SUNG
Executed: 2018-12-07
LIU, RU-GUN
Executed: 2018-12-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Lithography Process Monitoring Method