Patent Assignment
Reel/Frame 060939/0690
Assignment of Assignor's Interest
Recorded: 2022-08-30
Pages: 5
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Electrostatic Chuck with Multiple Radio Frequency Meshes to Control Plasma Uniformity