Patent Assignment
Reel/Frame 060949/0712
Assignment of Assignor's Interest
Recorded: 2022-08-31
Pages: 3
Assignor
HIRAOKA, SHO
Executed: 2022-08-30
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus