Patent Assignment
Reel/Frame 060983/0851
Assignment of Assignor's Interest
Recorded: 2022-09-02
Pages: 8
Assignors
SAKURAI, HIROKI
Executed: 2022-08-22
KOSAI, KAZUKI
Executed: 2022-08-16
SHINOHARA, KAZUYOSHI
Executed: 2022-08-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus