Patent Assignment
Reel/Frame 061000/0335
Assignment of Assignor's Interest
Recorded: 2022-09-06
Pages: 18
Assignors
KYOKANE, HIROKAZU
Executed: 2022-08-16
MATSUI, HIDEFUMI
Executed: 2022-08-15
FUKUMOTO, TOSHIYUKI
Executed: 2022-08-16
ITOH, SATOSHI
Executed: 2022-08-15
IMANAKA, MASASHI
Executed: 2022-08-25
TSURUDA, TOYOHISA
Executed: 2022-08-15
ENOMOTO, MASASHI
Executed: 2022-08-15
YANAGISAWA, MASAHIRO
Executed: 2022-08-16
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium