Patent Assignment
Reel/Frame 061034/0489
Assignment of Assignor's Interest
Recorded: 2022-09-09
Pages: 3
Assignor
YAMAGUCHI, WATARU
Executed: 2022-07-29
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measuring Device, Measuring Method, Substrate Processing Apparatus, and Method of Manufacturing Product