Patent Assignment
Reel/Frame 061037/0801
Assignment of Assignor's Interest
Recorded: 2022-09-09
Pages: 3
Assignor
SENSHU, KOHEI
Executed: 2022-07-28
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Holding Device, Method of Determining Attraction Abnormality in Holding Device, Lithography Apparatus, and Method of Manufacturing Article