Patent Assignment
Reel/Frame 061045/0110
Assignment of Assignor's Interest
Recorded: 2022-09-09
Pages: 4
Assignor
YEO, JUHEE
Executed: 2022-05-19
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Compositions and Methods for Selectively Etching Silicon Nitride Films
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.