Patent Assignment
Reel/Frame 061045/0056
Assignment of Assignor's Interest
Recorded: 2022-09-09
Pages: 5
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Properties
(2)
Compositions and Methods for Selectively Etching Silicon Nitride Films
Compositions and Methods for Selectively Etching Silicon Nitride Films
Application:
63/193,450 →
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.