IP Library › Patent Application 63193450
Patent Application Provisional
App. No. 63/193,450 · Confirmation No. 2424

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS

Applicant: ENTEGRIS, INC.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2021-06-07 APP.FILE.REC Filing Receipt 3 View
2021-05-26 PA.. Power of Attorney 1 View
2021-05-26 TR.PROV Provisional Cover Sheet (SB16) 3 View
2021-05-26 TRAN.LET Transmittal Letter 2 View
2021-05-26 ADS Application Data Sheet 8 View
2021-05-26 SPEC Specification 21 View
2021-05-26 CLM Claims 4 View
2021-05-26 ABST Abstract 1 View
2021-05-26 DRW.NONBW Drawings-other than black and white line drawings 1 View
2021-05-26 WFEE Fee Worksheet (SB06) 2 View
2021-05-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-05-26 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2021-05-26 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
63/193,450
Filed
2021-05-26