Patent Assignment
Reel/Frame 061100/0121
Assignment of Assignor's Interest
Recorded: 2022-08-05
Pages: 5
Assignors
YU, PETER
Executed: 2017-10-26
HSU, CHIH-TUNG
Executed: 2017-10-26
WANG, KEVIN
Executed: 2017-10-26
HU, CHIH-CHIA
Executed: 2017-10-26
CHEN, ROGER
Executed: 2017-10-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Multiple-Mask Multiple-Exposure Lithography and Masks